On-device research index

arXiv research

A locally-built, LLM-digested index of recent arXiv papers in quant finance, geometry/topology, and statistical ML — keyword search served straight from SQLite on this machine.

169,291 papers · 148 categories

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6 results for “lithography”

Data Efficient Lithography Modeling with Transfer Learning and Active Data Selectioncs.LG

Reduces data needed for resist modeling in lithography simulations.

problem High data demand for resist modeling in lithography simulations.

method Transfer learning and active data selection.

result 3-10X reduction in training data with comparable accuracy.

lithography resist modeling transfer learning active data selection data efficiency

2018-06-27abs ↗pdf ↗

Bridging the Gap Between Layout Pattern Sampling and Hotspot Detection via Batch Active Learningcs.LG

Paper proposes active learning for hotspot detection in VLSI design.

problem Hotspot detection in VLSI design is computationally expensive and relies on costly reference libraries.

method Active learning-based layout pattern sampling and hotspot detection flow.

result Significantly reduces lithography simulation overhead with satisfactory detection accuracy.

VLSI design Hotspot detection Active learning Layout pattern sampling Lithography simulation

2018-07-13abs ↗pdf ↗

Physics-informed data-driven machine health monitoring for two-photon lithographycs.LG

The paper develops methods for monitoring TPL machine health.

problem Inaccurate and untimely maintenance of TPL systems leads to poor quality and inefficiencies.

method Physics-informed data-driven predictive models integrated with statistical approaches.

result The methods achieve high accuracy across various scenarios and conditions.

two-photon lithography machine health monitoring data-driven physics-informed condition-based maintenance

2025-10-16abs ↗pdf ↗

VLSI Mask Optimization: From Shallow To Deep Learningcs.LG

Paper proposes a machine learning framework for VLSI mask optimization.

problem Costly VLSI mask optimization due to complex processes.

method Heterogeneous OPC framework using machine learning.

result Demonstrates efficiency and effectiveness of the proposed framework.

VLSI mask optimization machine learning deep learning deep design deep lithography

2019-12-16abs ↗pdf ↗

Automatic Layout Generation with Applications in Machine Learning Engine Evaluationcs.LG

This work evaluates machine learning-based hotspot detectors on synthesized layout patterns.

problem Evaluating model robustness and generality of machine learning-based hotspot detectors.

method Developed an automatic layout generation tool to synthesize various layout patterns and tested machine learning-based detectors on these synthesized layouts.

result Machine learning-based detectors need continuous study for robustness and generality in DFM flows.

machine learning hotspot detection layout generation DFM model robustness

2019-12-12abs ↗pdf ↗

Are Adversarial Perturbations a Showstopper for ML-Based CAD? A Case Study on CNN-Based Lithographic Hotspot Detectioncs.LG

Adversarial perturbations can fool CNN-based lithographic hotspot detectors, but retraining can improve robustness.

problem Adversarial perturbations can mislead ML-based lithographic hotspot detectors.

method Proposed adversarial retraining strategy to improve robustness of CNN-based detectors.

result Adversarial retraining significantly improves robustness of CNN-based hotspot detection against perturbations.

adversarial attacks CNN hotspot detection machine learning retraining

2019-06-25abs ↗pdf ↗